high purity
systems
for semiconductor
Dimensions:
78” H x 18” W x 22” D
1880 mm H x 458
mm W x 559 mm D

Weight
(not including cylinder):
325 lbs.

Exhaust Stack:
6” Diameter 4” H

Configurations:
Process
Dimensions:
78” H x 24” W x 22” D
1880 mm H x 610
mm W x 559 mm D

Weight
(not including cylinder):
400 lbs.

Exhaust Stack:
6” Diameter 4” H

Configurations:
Process-Process
Process-Purge
Process-Process-Xover
Dimensions:
78” H x 38” W x 22” D
1880 mm H x 966
mm W x 559 mm D

Weight
(not including cylinder):
550 lbs.

Exhaust Stack:
8” Diameter 4” H

Configurations:
Process-Process-Process
Process-Process-Purge
Process-Process-Purge-Xover
RTES GC
1 cylinder
RTES GC
2 cylinders
RTES GC
3 cylinders